Chapter 1: MEMS - A Disruptive Technology Roadmap
Dr. Steve Walsh, Director of the Technological Entrepreneurship Program, University of New Mexico

SEMI, agencies of the European Union and the U.S., internationally-based industry organizations, research institutes, and academic institutions working in the MST area have all endorsed the establishment of a roadmap development activity. One goal of a roadmap is to provide precompetitive guidance on both R&D and needed infrastructure expenditures that would enhance the commercialization of microsystems. This kind of development is a necessary step for reducing communal risk to MST users, manufacturers, and suppliers alike. BioMEMS plays an important role in this roadmapping effort.

Chapter 2: Future Directions in the MEMS- Enabled Biological and Medical Systems Business
John West, Marketing Director for Microfluidics, Microcosm Technologies

Drug development, drug delivery and advanced diagnostics are some of the major potential markets for Bio-MEMS technology. This talk will focus on the scale and structure of the current industry, the design and development problems which need to be overcome for business growth, and the expected development of market structure.

Chapter 3: Panel - Future BioMEMS Market Panel
Chairperson, Dr. James H. Smith, Manager, Intelligent Micromachine Department, Sandia National Laboratories

Chapter 4: Seamless Micro System Engineering for BioMEMS Applications
Dr. Job Elders, President, Twente MicroProducts

Manufacturing of biomedical micro-components and micro systems differs from IC manufacturing because the markets requires a diversity of materials, a diversity of products and initially lower volumes per product. In the meantime, a diversity of micro-technologies have been developed, including non-IC compatible processes and potentially IC compatible processes. Promising combinations of these technologies are discussed, such as the use of RIE in silicon for mould making and subsequent embossing, as well as interesting BioMEMS applications, such as glass channels for electro-osmotic flow generation, and micro-fluidic components and systems.

Chapter 5: BioMEMS: Beyond Batch Fabrication
Dr. Marc Madou, Professor in Chemistry and Materials Science and Engineering, Ohio State University

The MEMS field is expanding from applications of IC technologies to mechanical devices to chemical and biological applications, and is also becoming broader in the type of materials and miniaturization methodologies employed. It requires a good understanding of manufacturing options, materials, scaling laws, and most importantly, an intimate knowledge of the intended application. Recent developments in BioMEMS devices for drug discovery and delivery, diagnostics, and biotelemetry point very much towards the need for a modular, non-silicon approach (‘beyond batch’) to building inexpensive disposable chemical and biological sensors and systems. Here we introduce an approach that merges traditional machining with IC based manufacturing and is more akin to packaging processes (e.g. drop delivery, pick and place) than to front-end production in the IC industry (e.g. lift -off, integration). By introducing large sheets and rolls we can go beyond the batch production mode and finally make disposable biosensors and biosystems an economic reality.

Chapter 6: Electroplating - An Extremely Powerful Enabling Technology in MEMS
Dr. Lubomyr T. Romankiw, IBM Fellow, IBM Thomas J. Watson Research Center

During the last decade electroplating through lithographic masks has been extended to MEMS under the name of LIGA. In MEMS it is making the deposition of extremely precise 3-D magnetic structures possible. Hence in addition to the weaker electrostatic forces traditionally used in silicon structures, much stronger magnetic and electromagnetic forces become available for building MEMS sensors, actuators and other devices. This talk, after reviewing the evolution of plating through lithographic masks for large volume manufacture of electronic components will give examples of how this technology can be used to build magnetic bioMEMS devices.

Chapter 7: Molded Microdevice Manufacture for Medical Applications via the LIGA Process
Dr. Kevin W. Kelly, Associate Professor of Mechanical Engineering, Louisiana State University

LSU is developing methods to inexpensively fabricate a variety of microdevices for traditional mechanical engineering applications using the LIGA manufacturing process. A variety of biological instruments being developed utilize micro scale channel dimensions to minimize sample size, increase throughput, etc. The LIGA process offers the potential to inexpensively manufacture these highly complex micro scale flow systems from a variety of materials. The progress made towards fabricating these systems using the LIGA process will be presented.

Chapter 8: An Overview of Micromechanical Machining Processes for BioMEMS
Dr. Robert O. Warrington, Dean of Engineering, Michigan Technological University

This talk will overview the different micromechanical machining processes that could be used in the fabrication of bioMEMS devices. Characteristics and comparisons among the different processes (such as micromilling, microdrilling, micro-EDM, laser ablation and photopolymerization) will be made. There will be a discussion on mass fabrication methods using these technologies and particular emphasis will be placed on 3-D micromachining. Special consideration will be given to the microdrilling/milling technology at Michigan Technological University.

Chapter 9: Macro- and Micro-Molding of Polymeric Materials
Dr. L. James Lee, Professor of Chemical Engineering, Ohio State University

The demand for miniature parts and processing capability to produce them with the necessary precision has been growing fast in the last 10 years. The emerging market includes biosensors and instruments, telecommunication components, automotive, camera and watch components. Polymeric materials are excellent candidates for these applications because of their low cost, good processability, and bio-compatibility. They can also be reinforced by nano-size particles for better mechanical and physical properties. This talk will present several conventional macro-molding technologies, such as reaction injection molding (RIM), transfer molding, injection-compression molding, and thin-wall injection molding. Their potential for micro-molding will be discussed.

Chapter 10: Living Chip Technology: BioMEMS applied to the creation of cell- based microdevices for drug discovery, cancer screening and toxin detection
Dr. Colin Brenan, Postdoctoral Research Associate, Massachusetts Institute of Technology

We are developing biosensor technologies based upon arrays of microneedles. Traditional manufacturing techniques, such as silicon MEMs, are unsuitable for producing such high aspect ratio microstructures. As such, we have developed two novel fabrication methods: one which employs microwire and microsink EDM, and another which involves inserting needles into a template with the aid of a magnetic field.

Chapter 11: Thin-Walled Compliant Plastic Structures for Fluidic Systems
Robin R. Miles, Research Engineer, Lawrence Livermore National Laboratory

Thin-walled, compliant plastic structures for meso-scale fluidic systems were fabricated, tested and used to demonstrate valving, pumping, metering and mixing. These structures permit the isolation of actuators and sensors from the working fluid, thereby reducing chemical compatibility issues. The thin-walled, compliant plastic structures can be used in either a permanent, reusable system or as an inexpensive disposable for single-use assay systems. The five different methods for fabricating thin-walled plastic structures discussed include laser welding, molding, vacuum forming, thermal heat staking and photolithographic patterning techniques.

Chapter 12: AMANDA - Surface Micromachining, Molding, and Diaphragm Transfer
Dr. Werner Schomburg, Group Leader, Microfluidics and Membrane Technology, Institute for Microstructure Technology

Micromolding allows mass production of complex microstructures at low costs from a variety of polymers. The mold inserts are fabricated according to the needed accuracy by milling and drilling, photolithography and electroplating, or LIGA. A diaphragm can be patterned by surface micromachining and transferred to molded housings to provide movable parts. This is called the AMANDA-process which is distinguished by low-cost batch fabrication of reliable microdevices with a high yield. A case study of the small-scale production of micropumps demonstrates the advantages and limits of this process.

Chapter 13: Micro Stereo Lithography and Its Biomedical Applications
Dr. Koji Ikuta, Professor, Department of Micro System Engineering, Nagoya University

Micro stereo lithography (IH process) was established in 1992. More recently, the Super IH process, based on a new method, has been developed to achieve better than one micron resolution. By using this technique, various kinds of three dimensional micro structures such as 3D micro fluidics, 3D movable micro mechanisms, and chemical IC chips have been produced.

Chapter 14: Rapid Prototyping of the LabCD™: A Microfabricated Centrifugal System
Dr. David C. Duffy, Senior Scientist, Gamera Bioscience Corp.

We describe the rapid prototyping of microfluidic systems in a silicone - poly(dimethylsiloxane) (PDMS) -and applications for the high-volume manufacture of BIOMEMS. We present examples of microfluidic systems created using rapid prototyping for use on the LabCD™ - a centrifugal microfluidic technology capable of conducting a wide range of automated tests in diagnostics, genomics, proteomics, and drug screening.

Chapter 15: Fluidic Microsystems for Small Volume Dispensing
Dr. Bart van der Schoot, Director of Research and Development, Seyonic SA

Modern techniques in bio-analytical research require large numbers of parallel assays in ever diminishing quantities of solution. Microfabrication makes it possible to develop dispensing systems with a flow sensor in each individual channel, very close to the point where the actual dosing takes place. This eliminates the inertia effects of large dead volumes and thus allows for maximum speed and accuracy.

Chapter 16: microDiagnostics™: Fluidics for Real World DNA Diagnostic Applications
Dr. Allen Northrup, Vice President and Chief Technical Officer, Cepheid

Modern diagnostic technology demands the ability to detect and identify pathogens (such as HIV and E. coli), which may be present in complex biological samples (such as blood or food), at concentrations as low as 10 copies/mL of sample. For these applications, nucleic acid must be extracted and purified from several milliliters of sample fluid. A judicious integration of unique BioMEMS chips and traditional plastic biomedical approaches can provide powerful and effective new concepts for DNA diagnostics.

Chapter 17: Disposable Polymer Chips for BioMEMS Applications
Dr. Holger Becker, CEO, Jenoptik Mikrotechnik GmbH

Novel miniaturized analytical techniques have created a need for low-cost fabrication methods for disposable devices on polymer substrates. We have developed Hot Embossing as a microfabrication method which is particularly suited for chip-based applications like capillary electrophoresis, PCR as well as nanowell plates with well volumes in the pL-nL range. These devices can be used as disposables, e.g. for applications in clinical diagnostics or UHTS.

Chapter 18: Cost-Effective Manufacturing and Development of BioMEMS
Andrew Swiecki, Director of Marketing and Sales, IntelliSense Corporation

Applications for microfabricated devices in the biomedical field abound. Unique features of bioMEMS enable technical capabilities not previously possible. However, development and manufacturing issues have impeded the widespread commercialization of bioMEMS. Solutions to these issues involve software tools for cost effective device design and flexible MEMS foundries for efficient manufacturing. IntelliSense describes successful bioMEMS commercialization through case examples.